Process Physics in Thermal Nanoimprint
نویسندگان
چکیده
منابع مشابه
Glass nanostructures fabricated by soft thermal nanoimprint
An one-step, fast and potential low cost process has been developed to fabricate silica like glass nanostructures by combining sol-gel chemistry and thermal nanoimprint. An inorganic-organic sol-gel thin film is patterned at low pressure and temperature with flexible stamps. Various geometries are achieved with a patterning resolution of about 150 nm and patterns aspect ratio higher than 4. To ...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2010
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.76.143